Method to pattern etch masks in two inclined planes for three-dimensional nano- and microfabrication

Three-Dimensional Microfabrication by Two-Photon Polymerization

Assembly and Molding Processes for Three-dimensional Microfabrication Assembly and Molding Processes for Three-dimensional Microfabrication Assembly and Molding Processes for Three-dimensional Microfabrication

Lithographic semiconductor microfabrication has been employed with great success for the manufacture of mechanical structures, achieving microscopic dimensions and great complexity at low cost. However, due to the inherently planar nature of the lithographic process, this technology is limited in its capability to produce three-dimensional structures. In this work, three strategies are presente...

Nano-/Microfabrication of Biomaterials

The surface composition and functionality of biomaterials and scaffolds are the most important factors for their applications in biomedical fields and tissue regeneration. Bulk and surface properties of biomaterials influence vital cell activities such as cell adhesion, proliferation, extracellular matrix secretion, and differentiation. Nano-/microstructural control is found to be another key f...

Projection Microfabrication of Three-Dimensional Scaffolds for Tissue Engineering

This article presents a micromanufacturing method for direct projection printing of threedimensional scaffolds for applications in the field of tissue engineering by using a digital micromirror-array device (DMD) in a layer-by-layer process. Multilayered scaffolds are microfabricated using curable materials through an ultraviolet (UV) photopolymerization process. The prepatterned UV light is pr...

Silicon micro-masonry using elastomeric stamps for three-dimensional microfabrication

We present a micromanufacturing method for constructing microsystems, which we term ‘micro-masonry’ based on individual manipulation, influenced by strategies for deterministic materials assembly using advanced forms of transfer printing. Analogous to masonry in construction sites, micro-masonry consists of the preparation, manipulation, and binding of microscale units to assemble microcomponen...